Lab-on-CMOS integration of microfluidics and electrochemical sensors.

05:53 EDT 27th May 2015 | BioPortfolio

Summary of "Lab-on-CMOS integration of microfluidics and electrochemical sensors."

This paper introduces a CMOS-microfluidics integration scheme for electrochemical microsystems. A CMOS chip was embedded into a micro-machined silicon carrier. By leveling the CMOS chip and carrier surface to within 100 nm, an expanded obstacle-free surface suitable for photolithography was achieved. Thin film metal planar interconnects were microfabricated to bridge CMOS pads to the perimeter of the carrier, leaving a flat and smooth surface for integrating microfluidic structures. A model device containing SU-8 microfluidic mixers and detection channels crossing over microelectrodes on a CMOS integrated circuit was constructed using the chip-carrier assembly scheme. Functional integrity of microfluidic structures and on-CMOS electrodes was verified by a simultaneous sample dilution and electrochemical detection experiment within multi-channel microfluidics. This lab-on-CMOS integration process is capable of high packing density, is suitable for wafer-level batch production, and opens new opportunities to combine the performance benefits of on-CMOS sensors with lab-on-chip platforms.


Electrical and Computer Engineering Department, Michigan State University, East Lansing, MI 48824, USA.

Journal Details

This article was published in the following journal.

Name: Lab on a chip
ISSN: 1473-0189


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