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We report a detailed analysis on the use of simultaneous substrate heating in conjunction with scanning thermal lithography (SThL) to dramatically increase the patterning speed of conventional SThL systems. The investigation consists of finite element simulations as well as practical assessments of the speed at which different organic precursors are thermally converted to produce standalone electrically active and passive nanostructures. As a proof of concept the high-speed SThL method was used to pattern semiconducting pentacene nanoribbons, which were subsequently incorporated into functioning transistors. Simultaneous substrate heating was found to allow patterning of functional devices at writing speeds >19 times higher than transistors produced at identical speeds but with the substrate maintained at room temperature. These fast written transistors exhibit 100× higher hole mobility with high on/off current ratio and negligible operating hysteresis. The generality of the proposed high-speed SThL method was further demonstrated with the rapid patterning of conductive nanostructured metal electrodes with excellent spatial resolution employing an appropriate polymer precursor as the chemical resist. It is proposed that these advances further support the case for using SThL systems as rapid prototypers for low micron and nanoscale structures for both direct patterning of precursors and indirect patterning of metals and other materials using suitable chemical resist.
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Electronic devices that increase the magnitude of a signal's power level or current.
Liquid chromatographic techniques which feature high inlet pressures, high sensitivity, and high speed.
Discarded electronic devices containing valuable and sometimes hazardous materials such as LEAD, NICKEL, CADMIUM, and MERCURY. (from http://www.epa.gov/osw/conserve/materials/ecycling/faq.htm#impact accessed 4/25/2010)
Electrical devices that are composed of semiconductor material, with at least three connections to an external electronic circuit. They are used to amplify electrical signals, detect signals, or as switches.