Low-damaged p-type doping of MoS2 using direct nitrogen plasma modulated by toroidal-magnetic-field.

08:00 EDT 12th September 2019 | BioPortfolio

Summary of "Low-damaged p-type doping of MoS2 using direct nitrogen plasma modulated by toroidal-magnetic-field."

Low damaged doping of two dimensional (2D) materials proves to be a significant obstacle in realizing fundamental devices such as p-n junction diodes and transistors due to its atom layer thickness. In this work, the defect formation energy and p-type conduction behaviour of nitrogen plasma doping are investigated by first-principle calculation. Low damaged substitutional p-type doping in MoS2 using low energy nitrogen plasma composed of N+ and N2+ is achieved by a novel toroidal magnetic field (TMF). The TMF helps to raise the concentration of N2+ ions at low RF power condition. The electrical characteristics of double-layer MoS2 field-effect transistors (FETs) clearly show an efficient p-type doping behavior. Atomic Force Microscope is applied to verify the slight damage in MoS2. X-ray photoelectron spectroscopy, photoluminescence and Raman spectroscopy confirm the effective p-type doping characteristic with weak damage. These findings provide a low damage technology for efficient carrier modulation of MoS2 and other homogeneous TMDC materials, which overcomes barriers in developing 2D electronic and optoelectronic devices.


Journal Details

This article was published in the following journal.

Name: Nanotechnology
ISSN: 1361-6528


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