Track topics on Twitter Track topics that are important to you
The atomic layer etching (ALE) of silicon nitride (SiN) via a hydrogen plasma followed by exposure to fluorine radicals was investigated using spectroscopic ellipsometry and attenuated total reflectance Fourier transform infrared spectroscopy to examine the surface reactions and etching mechanism. FTIR spectra of the surface following exposure to the hydrogen plasma showed an increase in the concentration of Si-H and N-H bonds, although the N-H bond concentration plateaued more quickly. In contrast, during fluorine radical exposure, the Si-H bond concentration decreased more rapidly. Secondary ion mass spectrometry demonstrated that the nitrogen atom concentration was decreased to a depth of 4 nm from the surface after the hydrogen plasma treatment, and indicated a structure consisting of N-H rich, Si-H rich, and mixed layers. It appears that Si-H bonds were primarily present near the surface, with N-H bonds mainly located deeper into the film. The formation of these N-H and Si-H rich layers are important phenomena associated with modification by hydrogen plasma and fluorine radical etching, respectively.
This article was published in the following journal.
Name: ACS applied materials & interfaces
The ultrathin thickness (~1-2 nm) of native oxide layer on silicon surfaces which acts as efficient trapping centers precludes the possibility of studying its impact on the surface-charge carrier dyna...
Photo atomic layer etching (photo-ALE) of GaAs and AlGaAs semiconductors was investigated in deionized H2O and aqueous solution of NH4OH under weak excitation conditions (P 20 mW/cm2). The process...
Silicon nanowires (SiNWs) show a great potential for energy applications because of the optical confinement effect, which enables the fabrication of highly efficient and thin crystalline silicon (c-Si...
The poor cycling performance of silicon-based (Si-based) anodes hinder their practical application. Here, a fresh and fundamental mechanism is proposed for the rapid capacity decay of Si-based materia...
The surface of diamond is reported to undergo nonablative photochemical etching when exposed to ultraviolet (UV) radiation which allows controlled single and partial layer removal of lattice layers. O...
Modified perforated membrane (MPM) is considered as a modality that could enable participation of periosteal cells and gingival stem cells which could improve the outcomes of guided tissue...
The goal of this study is the evaluation of an atomic magnetometer that is practical for human biomagnetism studies. We have built a device that has the necessary sensitivity, and will be ...
The aim of this study is to evaluate the effect of shortening the etching time on the 18-month clinical performance of resin composite restorations in primary molars after partial carious ...
This study aims to determine if a silicon-based gel and a silicon-based aerosol are effective in the treatment of postoperative scars.
Objective: This double-blind randomized clinical trial evaluates strategies for improving the bonding of universal adhesive to enamel in non-carious cervical lesions (NCCL) of a new univer...
A trace element that constitutes about 27.6% of the earth's crust in the form of SILICON DIOXIDE. It does not occur free in nature. Silicon has the atomic symbol Si, atomic number 14, and atomic weight 28.09.
Preparation of TOOTH surfaces and DENTAL MATERIALS with etching agents, usually phosphoric acid, to roughen the surface to increase adhesion or osteointegration.
Preparation of TOOTH surfaces, and of materials bonded to teeth or DENTAL IMPLANTS, with agents and methods which roughen the surface to facilitate adhesion. Agents include phosphoric or other acids (ACID ETCHING, DENTAL) and methods include LASERS.
A non-metal element that has the atomic symbol P, atomic number 15, and atomic weight 31. It is an essential element that takes part in a broad variety of biochemical reactions.
A metallic element with atomic symbol Fe, atomic number 26, and atomic weight 55.85. It is an essential constituent of HEMOGLOBINS; CYTOCHROMES; and IRON-BINDING PROTEINS. It plays a role in cellular redox reactions and in the transport of OXYGEN.
Blood is a specialized bodily fluid that delivers necessary substances to the body's cells (in animals) – such as nutrients and oxygen – and transports waste products away from those same cells. In vertebrates, it is composed of blo...