Thick adherent diamond films on AlN with low thermal barrier resistance.

08:00 EDT 11th October 2019 | BioPortfolio

Summary of "Thick adherent diamond films on AlN with low thermal barrier resistance."

Growth of $>$100 $\mu$m thick diamond layers adherent on aluminium nitride with low thermal boundary resistance between diamond and AlN is presented in this work. Thermal barrier resistance(TBR$_{\mbox{\tiny{eff}}}$) was found to be in the range of 16 m$^2$K/GW which is a large improvement on the current state-of-the-art. While thick films failed to adhere on untreated AlN films, hydrogen/nitrogen plasma treated AlN films retained the thick diamond layers. Clear differences in zeta potential measurement confirms surface modification due to hydrogen/nitrogen plasma treatment. An increase in non-diamond carbon in the initial layers of diamond grown on pre-treated AlN is seen by Raman spectroscopy. The presence of non- diamond carbon has minimal effect on the thermal barrier resistance. The surfaces studied with x-ray photoelectron spectroscopy (XPS) revealed a clear distinction between pre-treated and untreated samples. The surface aluminium goes from nitrogen rich environment to an oxygen rich environment after pre-treatment. A clean interface between diamond and AlN is seen by cross sectional transmission electron microscopy.


Journal Details

This article was published in the following journal.

Name: ACS applied materials & interfaces
ISSN: 1944-8252


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